Leading Semiconductor Chiller Supplier and Manufacturer in China Over 20 Years
TopChiller is manufacturing high quality semiconductor chillers to provide full cooling solutions for your semiconductor facilities

TopChiller can design and manufacture all types of semiconductor chillers for you

  • Cooling capacity ranges from 1 Ton to 120 Ton
  • Temperature control ranges from 5℃to 35℃
  • Scroll compressor with superb efficiency
  • Low and high-temperature sensitive alarms
  • Water refilling & external pressure adjustment
  • Unified polyethylene tank & water pump
  • Temperature and pressure-flow adjustment
  • Non-marring locking caster & small footprint

Your Premier Semiconductor Chiller Manufacturer and Supplier in China

Semiconductor Chiller is a peculiar design cooling machine working on refrigeration principle for heat exchange and cooling products in semiconductor manufacturing and microchip processing by using chilled water or air circulation.

TopChiller is a renowned company in China that has engineered the best systemized Semiconductor Chiller with a superb performance to meet the needs of specific applications of the customers since 1999.

For over the last twenty years TopChiller has successfully manufactured a full stock of certified Semiconductor Chiller and supplied it to a various array of well-known companies all over the world.

TopChiller has designed Semiconductor Chiller by using different branded components as scroll compressor, heat exchanger, water tank, water/air-cooled condenser, water pump, control system, pressure flow adjusting unit, temperature sensor, fluid reservoir, Airflow inlet, hot gas bypass, and eco-friendly refrigerant.

TopChiller designed Semiconductor Chiller has a large number of remarkable benefits for Semiconductor processing industries as given below.

  • Semiconductor Chiller is installed with environment-friendly CFC refrigerant and corrosion-free wetted surfaces that enable coolant streamline flow by protecting from erosion and obstruction in coils.
  • TopChiller designed Semiconductor Chiller has an energy-efficient compressor featured with a hot gas bypass that automatically regulates heat load and pressure ultimately protects the compressor and pressure from heating damage.
  • Semiconductor Chiller is easy to install for small space applications, easy to move and standby as well as supports the microchip processing configured by locking caster wheels and small footprint.
  • TopChiller brand Semiconductor Chiller provides a consistent cooling effect to semiconductor machines either by using air conditioning or chilled water circulation inside insulated coils of the unit triggered with consistent compression force.
  • Semiconductor Chiller performs a reliable and noise-free quiet operation featured by suction valves and smoothly working scroll compressor.
  • TopChiller engineered Semiconductor Chiller protects the owner from extra expenses for unit maintenance configured by the installation of high/low-temperature sensors that cut-off power supply in an emergency.

Semiconductor Chiller is used for a variety of applications as given below:

Process chamber cooling, semiconductors processing, ATE regulation, microchip manufacturing, PVD, lithography, CMP, mass spectroscopy (MS), Ion torrent machines, metrology tools cooling, UV cure system, crystal growing, and cutting, etc.

If you want to purchase a best-suited and highly applicable Semiconductor Chiller for your application?

If you are sourcing to find the best manufacturing company of Semiconductor Chiller with superb reliability and flawless performance in China?

TopChiller Company is best to choose supporting customers significantly. For further details and solutions for your problem, make contact with TopChiller sales and technocrats to get the best optimal solution and buying assistance for Semiconductor Chiller.

Our team is committed to availing our clients with notations about a Semiconductor Chiller best suited to your application after thoroughly understanding customer requirements.

Semiconductor Chiller Technical Specifications
Items                              ModelAC-0.5AAC-1AAC-1.5AAC-2AAC-2.5AAC-3AAC-4AAC-5AAC-6AAC-8ADAC-10ADAC-12ADAC-15AD
Cooling capacityKcal/h
50HZ/60HZ
1419245131824833584871819288119881453418576239942906838270
17032941378458007018861711146143861744122291287933488245924
KW
50HZ/60HZ
1.652.853.75.626.88.3510.813.9416.921.627.933.844.5
1.983.424.46.748.210.0212.9616.7320.2825.9233.4840.5653.4
 Input powerKW0.881.3522.252.663.274.075.756.458.2511.512.917.45
Max CurrentA5.48.21213.66.68.210.113.815.52027.931.342.4
Power source1PH~220V/3PH~220V/380V 50HZ/60HZ3PH~380V/415V/480V~50HZ/60HZ(3PH~200V/220V   50HZ/60HZ)
RefrigerantTypeR22/R407C/134a/404A/410A
ControlCapillary / thermostatic expansion valve
CompressorTypeHermetic RotaryHermetic scroll ( piston )
Power(KW)0.450.891.31.732.12.73.54.555.253.5×24.55×25.25×27×2
CondenserType Efficient finned copper tube with aluminum+low noise external rotor fan
Air flow (m3/h)750100015002000250030004000500060008000100001200015000
Air blower(KW)0.060.090.150.150.190.14×20.14×20.19×20.19×20.25×20.45×20.45×20.6×2
EvaporatorTypeSS Tank coil / shell and tube type / Plate type heat exchanger
 Chilled water
(m3/h)
0.280.490.640.971.121.441.862.42.913.714.85.817.65
0.340.590.761.161.41.722.232.883.494.465.7679.18
Water tank(L)10.618.3272750506060110120200200270
Inlet/outlet pipe
(inch) i
1/2″1/2″1/2″1/2″1″1″1″1″1″1-1/2″2″2″2″
Water pumpPower (kw)0.370.370.370.370.370.370.370.750.750.751.51.52.2
Max lift(m)22222222222222303025252528
Max flow (m3)5.45.45.45.45.45.45.48.18.18.113.513.525.2
Safety protectionCompressor inner protection, over current protection, high/low pressure protection, over temperature protection, flow rate protection, phase sequence/phase missing protection, low level coolant protection, anti freezing protection, exhaust overheat protection
Dimension L(mm)550550600600720980980115011501350150015001860
W(mm)350450500500550520520560560680760760850
H(mm)695845985985135011701170121512151530166016601900
Net weight(KG)45628595125152175185215283345382580
Note:
The above specifications are according to the following design conditions:
1, 12℃/7℃.Chilled water inlet/outlet temperature 12℃/7℃.
2, 33℃/38℃.Cooling air inlet/outlet temperature 33℃/38℃.
We reserve the right to modify the specification without further notice.
Semiconductor Chiller Technical Specifications
Items                               ModelAC-15ATAC-20ADAC-20AFAC-25ADAC-25AFAC-30ADAC-30ATAC-40ADAC-40AFAC-50ADAC-50AFAC-60AD
Cooling capacityKcal/h
50HZ/60HZ
361204996647988584805813674734749229804099760119024116960144996
43344599595758670176697638968189990117648119712142829140352173995
KW
50HZ/60HZ
4258.155.86867.686.987.2114116138.4136168.6
50.469.7266.9681.681.12104.28104.64136.8139.2166.08163.2202.3
Input powerKW17.121.732225.424.833.3933.144.9143.357.35465
Max CurrentA43.252.753.363.761.38180.2109106135.5128.5135
Power source3PH~380V/415V/480V~50HZ/60HZ(3PH~200V/220V   50HZ/60HZ)
RefrigerantTypeR22/R407C/134a/404A/410A
ControlCapillary / Thermostatic expansion valve
CompressorTypeHermetic scroll ( piston )
Power(KW)4.55×38.96×24.55×410.8×25.25×413.62×28.96×318.78×28.96×423.6×210.8×427.4×2
CondenserTypeEfficient finned copper tube with aluminum+low noise external rotor fan
Air flow (m3/h)150002000020000250002500030000300004000040000500005000060000
Air blower(KW)0.6×20.78×20.78×20.78×20.78×20.42×60.42×60.6×60.6×60.78×60.78×60.78×6
EvaporatorTypeSS Tank coil/ shell and tube type/Plate type heat exchanger
Chilled water
(m3/h)
7.22109.611.6911.6214.941519.619.9523.823.429
8.6711.9911.5114.0313.9517.931823.5223.9428.628.134.8
Water tank(L)270350350350350420420580580580580580
 inlet/outlet pipe
(inch)
2″2″2″2-1/2″2-1/2″2-1/2″2-1/2″3″3″3″3″3″
Water pumpPower(kw)2.22.22.22.22.244445.55.55.5
Max lift(m)282828282830303030323232
Max flow (m3)25.225.225.225.225.236363636404040
Safety devicesCompressor inner protection, over current protection, high/low pressure protection, over temperature protection, flow rate protection, phase sequence/phase missing protection, low level coolant protection, anti freezing protection, exhaust overheat protection
DimensionL(mm)186020202020202020202200220023502350260026002600
W(mm)8509509509509501150115013501350150015001500
H(mm)190020002000200020001980198020002000210021002100
Net weight(KG)58065065081081089089011121112132013201320
Note:
The above specifications are according to the following design conditions:
1, Chilled water inlet/outlet temperature 12℃/7℃.
2, Cooling air inlet/outlet temperature 33℃/38℃.
We reserve the right to modify the specification without further notice.

Why TopChiller is Your Reliable Semiconductor Chiller Manufacturer and Supplier In China?

Experienced in Semiconductor Chiller
Over 20 years rich experience of semiconductor chiller manufacturing offering a complete of semiconductor chiller designs and models to meet your requirements.
Full Solutions Provider
Our services including: semiconductor chiller requirement communication, analysis, designing, manufacturing, quality controller, delivery, Keep advising not just manufacturing.
Reduce Your Costs
With rich experience of making semiconductor chillers for your industrial applications can help to work out the correct semiconductor chiller suitable for your needs,our high quality semiconductor chillers will save your costs
Top Quality Control
We always take good care of your semiconductor chiller order from design,raw material purchasing,manufactured,testing and delivery to make sure all semiconductor chiller making process are under control.
Global Chiller Shipment
No matter which country you are from, just tell your nearest seaport or airport name, we can arrange your semiconductor chiller order at fastest shipping even can do door to door delivery.
No Worries Service
World business trip/semiconductor chiller related exhibitions&fairs 2-3 times yearly can settle face to face meeting, 24*7*365 online service service with fast feedback.

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TopChiller: Your Premier Semiconductor Chiller Manufacturer and Supplier in China

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